|NON-RETURN VALVE, VITON|
Double distilled hydrocarbon vacuum pump oil for use in mechanical pumps and diffusion pumps. Invoil 20 has high resistance to corrosive attack, low vapor pressure and reduced backstreaming. Recommended for use in plasma etch systems, LPCVD, furnaces, metallization and mass spectrometers.
Overhaul Kit with Filters for Busch 016D & 0202D vacuum pumps. This kit includes filters.