Vacuum Pump Parts - Vacuum Pump Repair Kits & Accessories

Featured Products

!NEW! Refurbished Turbomolecular Pumps Now Available!

We are now offering refurbished turbo pumps so you can replace your old pump at a reasonable cost. All refurbished pumps are repaired by trained technicians with parts that meet or exceed all OEM specifications. All are tested to meet manufacturer specifications and come with a one year warranty. Inventory availability changes from day to day so please call with your requirements. You can check out our list of in-stock turbomolecular pumps on our service site at http://www.capvacservice.com/pump-inventory.php.

SKU17698

Please call 1-800-237-3933 or Contact Us for current pricing

!Refurbished Rotary Vane and Scroll Pumps Now Available!

We are happy to announce that we can now offer refurbished rotary vane and scroll vacuum pumps so you can replace your old pump at a reasonable cost. All refurbished pumps are repaired by trained technicians. All are tested to meet original new specifications and come with a one year warranty. Inventory availability changes from day to day so please call with your requirements.

SKU176981

Please call 1-800-237-3933 or Contact Us for current pricing

Exhaust Mist Elminator KF16

Exhaust Mist Eliminator for vacuum pumps, fits KF 16 flange.

Eliminates 99.7% of smoke particles (>0.3 micron)
Height 5", Diameter 2.5" (see detailed drawing)
Use replacement element 22RE-12-16

22FE-12-16

$207.00

Exhaust Mist Elminator KF25

Exhaust Mist Eliminator for vacuum pumps, fits KF25 flange

Eliminates 99.7% of smoke particles (>0.3 micron)
Height 8", Diameter 5" (see detailed drawing)
Chrome plated for corrosion resistance
Use replacement element 22RE-12-25

22FE-12-25

$397.00

Exhaust Mist Elminator KF40

Exhaust Mist Eliminator for vacuum pumps, fits KF40 flange.

Eliminates 99.7% of smoke particles (>0.3 micron)
Height 9", Diameter 9.5" (see detailed drawing)
Use replacement element 22RE-12-40

22FE-12-40

$250.00

Major Repair Kit, Varian DS42

Major Repair Kit for Varian DS42 pumps. Includes seal, or-rings, valves, springs, vanes and everything needed for a complete overhaul of the Varian DS42 pump.

23V-DS42-V

$260.00