The Right Parts, On Time, Every Time™1-800-237-3933

Schematic Pump Diagrams

All information is provided as a courtesy to our customers. Please check with the pump manufacturer for updated information. Capitol Vacuum Parts does not warrant the accuracy of the information provided by any pump manufacturer.

Alcatel/Adixen

Older Pumps

1004A, 2004A, 1008A, 2008A, 1012A, 2012A, 2020A (Standard Series)

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1004AC, 2004AC, 2008AC, 2012AC, 2020AC (Chemical Series)

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1033, 2033, 1063, 2063 (Standard Series)

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2033C, 2063C (Chemical Series)

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2033CP, 2033CP+, 2063CP, 2063CP+ (Plasma Series)

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2100A (Standard Series)

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2100AC (Chemical Series)

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Pascal Series

1005, 2005, 1010, 2010, 1015, 2015, 1021, 2021 (Standard Series)

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1005C, 2005C, 2010C, 2015C, 2021C (Chemical Series)

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2010CP, 2015CP, 2021CP (Plasma Series)

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1033, 2033, 1063, 2063 (Standard Series)

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2033C, 2063C (Chemical Series)

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2033CP, 2033CP+, 2063CP, 2063CP+ (Plasma Series)

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Pascal Series (new style)

2005SD, 2010SD, 2015SD, 2021SD (Standard Series)

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2005i, 2010i, 2015i, 2021i (Instrument Series)

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2005C1, 2010C1, 2015C1, 2021C1 (Chemical Series)

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2005C2, 2010C2, 2015C2, 2021C2 (Semiconductor Series)

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1033SD, 2033SD, 1063SD, 2063SD (Standard Series)

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2033C1, 2063C1 (Chemical Series)

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2033C2, 2063C2 (Semiconductor Series)

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2100SD (Standard Series)

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2100C1 (Chemical Series)

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Anest Iwata

ISP500 – all versions

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ISP250 – all versions

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Becker

Ebara

Please contact us for information at 800-237-3933 or email info@capvac.com

Edwards

E1M / E2M Series

E2M0.7, E2M1, E2M1.5

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E2M2, E1M5, E2M5, E1M8, E2M8

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E1M18, E2M18

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E2M28, E2M30

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E1M40, E2M40

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E1M80, E2M80

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E1M175, E2M175

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E1M275, E2M275

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RV Series

RV3, RV5, RV8, RV12

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ED Series

ED600, ED660

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EH & QMB Series

EH250, QMB250, EH500, QMB500, EH1200, QMB1200, EH2600, QMB2600, EH4200, QMB4200

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ESDP Series

ESDP30, ESDP30A

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DP & QDP Series

DP40, QDP40, iQDP40, DP80, QDP80, iQDP80

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Kinney

KC5, KC8, KC15

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KTC60, KTC112

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Leybold/Oerlikon

TRIVAC A Series

D2A, S4A, D4A, S8A, S16A, D16A, S30A, D30A, S60A, D60A, D90A

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TRIVAC B Series

D4B, S8B, D8B

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S16B, D16B, S25B, D25B

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S40B, D40B, S65B, D65B

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TRIVAC BCS Series

D16BCS, D25BCS

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D40BCS, D65BCS

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TRIVAC E Series

D1.5E, D2.5E

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D5E, D10E

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Sogevac (old style)

SV16, SV25

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SV40, SV65, SV100

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SV180, SV280

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SV200, SV300

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SV585

Please contact CapVac

SV630, SV630F, SV750

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Sogevac B

SV40B, SV65B, SV100B

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SV630B, SV750B

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Sogevac UV25

SC Dry Scroll Pumps

Piston Pumps

E75, E150, E250

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DK100, DK200

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Blower/Booster Pumps

WA/WS 150, 250, 500, 1000, 2000

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WA/WS 151, 251, 501, 1001, 2001

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Accessories

AR4-8, AR16-25, AR40-65

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CFS16/25, CFS40.65

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VaroVac

S400F, S600F

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Pfeiffer/Balzer

DUO5M, DUO5MC

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DUO10M, DUO10MC

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DUO20M, DUO20MC

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Precision Scientific

DD90, DD195, DD130

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DDC90, DDC195, DDC130

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P100, P200, P300, P420

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PC100, PC200, PC300, PC420

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PC765, PC1420

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Stokes

Rotary Vane Pumps

005, 009, 013, 017, 023

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Blower / Booster Pumps

Vacuubrand

ME/MD/MZ/MV Series

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RE/RZ/RC Series

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Varian / Agilent

SD90, SD200, SD300

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CD200, CD300

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SD91, SD201, SD301, SD451

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CD91, CD201, CD301, CD451, CP451

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SD700, SD1400

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CD700, CP750, CD1400, CP1400

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SD2500, CD2500

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DS102, DS202, DS302, DS402, DS602

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300DS, 600DS

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TS300, TS600

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